Two components of SILVACO sorfware, ATHENA and ATLAS, wereadopted to study the process realization and characteristics of lateral PIN photodiode gated based on SOI. Using ATHENA to complete each step of process and annealing process. Finally, the entire device was accomplished. The ATLAS was used to simulate the I-V Characteristics with and without light, respectively, for device which achieved by ATHENA.Then, compared with the results of the modeling which built by...
