Ultra-precision lapping of H2O(g) plasma-treated CaF2 by porous diamond grits

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成果类型：

期刊论文

作者：

Li, Wei;Hu, Xiaolong;Ren, Yinghui;Zhou, Shenlei;Mao, Cong;...

通讯作者：

Li, W

作者机构：

[Li, W; Li, Wei; Hu, Xiaolong; Ren, Yinghui; Zhou, Yuting] Hunan Univ, Coll Mech & Vehicle Engn, Changsha 410082, Peoples R China.

[Li, Wei] Hunan Univ, Greater Bay Area Inst Innovat, Guangzhou 511300, Peoples R China.

[Zhou, Shenlei] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China.

[Mao, Cong] Changsha Univ Sci & Technol, Coll Automot & Mech Engn, Changsha 410114, Peoples R China.

[Ibrahim, Ahmed Mohamed Mahmoud] Minia Univ, Fac Engn, El Minya 61519, Egypt.

通讯机构：

[Li, W ] H

Hunan Univ, Coll Mech & Vehicle Engn, Changsha 410082, Peoples R China.

语种：

英文

关键词：

CaF 2 component;H 2 O(g) plasma;Ultra-precision lapping;Modification layer;Porous diamond

期刊：

Ceramics International

ISSN：

0272-8842

年：

2024

卷：

期：

页码：

7281-7292

DOI：

10.1016/j.ceramint.2023.11.334

基金类别：

Special program of stra-tegic leading science and technology of Chinese Academy of Sciences [52275421, 52005174, 51875192]; Hunan Province Fund for Distinguished Young Scholars [XDA25020317-05]; Hunan Provincial Major R&D Program Project [2022JJ10010]; Natural Science Foundation of Hunan Province [2022WK2003]; Natural Science Foundation of Guang-dong Province [2020JJ4193, 2021JJ40064]; Changsha Municipal Natural Sci-ence Foundation [2023A1515011193]; [kq2014048]

机构署名：

本校为其他机构

院系归属：

汽车与机械工程学院

摘要：

The calcium fluoride (CaF2) component has excellent light transmission and a high laser damage threshold in the UV band, and thus is a potentially ideal material for high-power laser facility. However, the low-damage surface is difficult to attain via the existing processing technologies due to its brittleness, especially the dissociation property of the (111) surface. We innovatively propose H2O(g) plasma-assisted porous diamond abrasive lapping technology to achieve low-damage and high-precision surface processing of CaF2 component, which means that the CaF2 component is modified first and t...

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Ultra-precision lapping of H2O(g) plasma-treated CaF2 by porous diamond grits

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