期刊论文

Impedance of RF Capacitive Coupled Plasma: A Simulation and Analytical Study

Wu, Q.

中文

真空科学与技术学报

1672-7126

2020

40

5

458-464

10.13922/j.cnki.cjovst.2020.05.12

本校为第一且通讯机构

为了进一步探索射频容性耦合放电等离子体,本文建立了以容性耦合等离子体(CCP)为基础的板-板电极一维轴线简化仿真模型。仿真采用氦气为工作气体,使用约化电子传递属性并忽略重粒子对流,利用有限元算法,综合讨论了一定范围内放电参数(气体压强、输入功率、电极直径以及间隙长度)变化时,放电等离子体阻抗的变动情况,并根据仿真所得数据进行理论分析。结果表明:四种仿真条件下的等离子体均呈现容抗特性;当气压升高、放电间隙长度变大时,初期均有利于碰撞电离的发生,而后将成为限制因素,使得等离子体阻抗呈现先减小后升高的变化趋势;当电极直径增大、输入功率增加时,初期等离子体阻抗均呈下降趋势,...

The formation of RF capacitive coupled plasma (CCP) of helium was empirically approximated by ignoring the convection of heavy particles, mathematically formulated with 1D plate-plate electrode model, theoretically analyzed and numerically simulated in finite element method.The influence of the four key variables, including the pressure, input power, electrode-diameter and gap-length, on the CCP-impedance was investigated in simulation and by data analysis.The simulated results show that the key variables all have a major impact.To be specific,...