The Ga doped ZnO (GZO) film was deposited on the polymer substrate at room temperature by magnetron sputtering. The resistivity is 8.9×10−4Ωcm. The average transmittance in the visible region is over 85%. According to the resistivity and transmittance in the visible light, it is obtained that the film exhibits excellent electrical and optical properties, which satisfies the application for optoelectronic devices. However, the adhesion between the film and the polymer substrate is very weak. In order to figure out the reason of the weak adhes...
