期刊论文

Liu, Fangyang

英文

Materials Science in Semiconductor Processing

1369-8001

2017

66

105-108

10.1016/j.mssp.2017.04.003

National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [51302021]; Scientific Research Fund of Hunan Provincial Education DepartmentHunan Provincial Education Department [13C1025]; Hunan provincial Engineering Research Center of Electric transportation and smart distribution network (Changsha University of Science and Technology)

本校为第一机构

The Ga doped ZnO (GZO) film was deposited on the polymer substrate at room temperature by magnetron sputtering. The resistivity is 8.9×10−4 Ω cm. The average transmittance in the visible region is over 85%. According to the resistivity and transmittance in the visible light, it is obtained that the film exhibits excellent electrical and optical properties, which satisfies the application for optoelectronic devices. However, the adhesion between the film and the polymer substrate is very weak. In order to figure out the reason of the weak adhesion, we study the adhes...