Catalyst-free synthesis and deposition mechanism of vertically oriented graphene on aluminum foil using PECVD

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成果类型：

期刊论文

作者：

Fan, Zheqiong;Chen, Cong;Li, Fenghong;Liu, Chaozong;Liu, Bo;...

通讯作者：

Liu, B

作者机构：

[Chen, Cong; Li, Fenghong; Fan, Zheqiong] Changsha Univ Sci & Technol, Coll Mat Sci & Engn, Changsha 410114, Peoples R China.

[Liu, B; Liu, Bo; Zhang, Zhihui] Jilin Univ, Key Lab Bion Engn, Minist Educ, Changchun 130022, Peoples R China.

[Liu, B; Liu, Bo; Liu, Chaozong] Univ Coll London, Royal Natl Orthopaed Hosp M14, UCL Inst Orthopaed & Musculo Skeletal Sci, Stanmore HA7 4LP, England.

通讯机构：

[Liu, B ] J

Jilin Univ, Key Lab Bion Engn, Minist Educ, Changchun 130022, Peoples R China.

Univ Coll London, Royal Natl Orthopaed Hosp M14, UCL Inst Orthopaed & Musculo Skeletal Sci, Stanmore HA7 4LP, England.

语种：

英文

关键词：

Vertically oriented graphene;Chemical vapor deposition;Growth mechanism;Precursors

期刊：

Applied Surface Science

ISSN：

0169-4332

年：

2025

卷：

701

页码：

163314

DOI：

10.1016/j.apsusc.2025.163314

基金类别：

CRediT authorship contribution statement Zheqiong Fan: Conceptualization, Data curation, Formal analysis, acquisition. Cong Chen: Conceptualization, Data curation, Formal analysis. Fenghong Li: Conceptualization, Formal analysis. Chaozong Liu: Data curation, Formal analysis. Bo Liu: Conceptualization, Data curation, Formal analysis, acquisition. Zhihui Zhang: acquisition.

机构署名：

本校为第一机构

院系归属：

材料科学与工程学院

摘要：

The catalyst-free growth of vertically oriented graphene (VG) networks with growth rate of about 5 nm/min on commercial aluminum (Al) foil via radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) is reported. The effects of process parameters, including precursor type and deposition temperature, on VG synthesis were systematically investigated. The deposition temperature plays a decisive role in the formation of VGs, while the precursor primarily influences growth rate and crystallinity. VGs were synthesized using either ethylen...

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Catalyst-free synthesis and deposition mechanism of vertically oriented graphene on aluminum foil using PECVD

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